2016 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)

BIB
2016
proceedings
IEEE Catalog Number: CFP16D58-ART
UPMC, Université Pierre et Marie Curie, Paris, France
ISBN: 978-1-5090-1510-8
µ4CNC
Modular multifunctional vacuum micro measurement station in accordance with the CNC-principle
Sinan Haliyo, Albert Sill, Stéphane Régnier, Sergej Fatikow