Development of an automated microrobot station for nanocharacterization - OFFIS

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Development of an automated microrobot station for nanocharacterization

Development of an automated microrobot station for nanocharacterization

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All authors

Fatikow, S. and Eichhorn, V. and Krohs, Fl. and Stolle, C. and Hagemann, S.

Booktitle

SPIE Conference - Microtechnologies for the New Millennium

Publishing date

05 / 2007

Type of Publication

inproceedings

Pages

6589-54

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