Multi template matching-based drift compensation for electron beam induced deposition

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Multi template matching-based drift compensation for electron beam induced deposition

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Waldemar Klauser ; Malte Bartenwerfer ; Sergej Fatikow

Booktitle

Nanotechnology (IEEE-NANO), 2017 IEEE 17th International Conference on

Publishing date

2017

Type of Publication

conference

Publisher

IEEE Xplore

Organization

IEEE

Series

International Conference on Nanotechnology (IEEE-NANO)

Pages

299 - 302

Projects

Nano-Q
Nanogranulare Sensoren für personenbezogenes Quecksilber-Monitoring (sorry - only available in german)

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