Multi template matching-based drift compensation for electron beam induced deposition

BIB
Waldemar Klauser ; Malte Bartenwerfer ; Sergej Fatikow
Nanotechnology (IEEE-NANO), 2017 IEEE 17th International Conference on
2017
conference
IEEE Xplore
IEEE
International Conference on Nanotechnology (IEEE-NANO)
299 - 302
Nano-Q
Nanogranulare Sensoren für personenbezogenes Quecksilber-Monitoring
10.1109/NANO.2017.8117258

OFFIS Autoren