The objective of the project is to develop a prototype of a multifunctional vacuum micro measurement station (VMM). The machine’s internal measurement environment is realized for vacuum conditions and still allows the use of the VMM in assembly lines. With a VMM surfaces and contours of (small) components can be detected and verified (like a miniaturized coordinate measurement machine – in short, micro – CMM), or material parameters of the tribology (friction force) can be detected and verified. Using highly accurate drives surfaces (profilometry) and positions of micro components are measured and verified, which the basis for quality assurance in these areas is. The objective is a compact device (50 cm × 50 cm × 50 cm), which is tailored to industrial applications. The trend of miniaturization is supported by measuring forces with resolutions in the micro-Newton range. The project brings together the results and findings of several cooperation projects between partners.