Nano-granular Layers for Sensor Applications fabricated by Means of Electron Beam induced Deposition

BIB
Klauser, W. and Bartenwerfer, M. and Elfert, P. and Krauskopf, J. E. and Fatikow, S.
Proc. of Micro-Nano-Integration
October / 2016
inproceedings
1-4
Nano-Q
Nanogranulare Sensoren für personenbezogenes Quecksilber-Monitoring

OFFIS Autoren

Dr.-Ing. Patrick Elfert
Dr.-Ing.
Patrick Elfert