Wafer-scale Automation of Electron Beam Induced Depositions

BIB
Elfert, Patrick and Bartenwerfer, Malte and Fatikow, Sergej
Proc. of IEEE International Conference on Advanced Intelligent Mechatronics (AIM) 2016
2016
inproceedings

OFFIS Autoren

Dr.-Ing. Patrick Elfert
Dr.-Ing.
Patrick Elfert